06 — PROJECT

Microfabrication Process Planning for Silicon Microstructures

3D microstructures for silicon wafer microfabrication process planning

Objective

  • Design fabrication process chains for ten distinct microstructures on silicon wafers, meeting target tolerances.
  • Select and justify manufacturing, etching, and measurement methods for each structure based on precision, cost, and material constraints.

Key Activities

  • Specification & Target Definition
  • Process Mapping
  • Etching Mechanism Evaluation
  • Lithography & Patterning Strategy Formulation
  • Quality Control & Metrology Planning

Skills & Tools

  • Trade-Off Analysis & Technology Benchmarking
  • Design for Manufacturing & Producibility Assessment
  • Manufacturing Process Selection & Process Chain Design
  • Geometric Tolerancing & Metrology Planning