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06 — PROJECT
Microfabrication Process Planning for Silicon Microstructures
Objective
- Design fabrication process chains for ten distinct microstructures on silicon wafers, meeting target tolerances.
- Select and justify manufacturing, etching, and measurement methods for each structure based on precision, cost, and material constraints.
Key Activities
- Specification & Target Definition
- Process Mapping
- Etching Mechanism Evaluation
- Lithography & Patterning Strategy Formulation
- Quality Control & Metrology Planning
Skills & Tools
- Trade-Off Analysis & Technology Benchmarking
- Design for Manufacturing & Producibility Assessment
- Manufacturing Process Selection & Process Chain Design
- Geometric Tolerancing & Metrology Planning